Microelectromechanical systems, commonly known as MEMS, refer to tiny integrated devices or systems that combine electrical and mechanical components. MEMS are millennia-sized devices - usually 1 micrometer to 1 millimeter in size - that have been fabricated using microfabrication technology. Over the past few decades, MEMS technology has enabled the mass production of miniaturized sensors, actuators and electromechanical components. Today, MEMS devices are ubiquitous across consumer electronics, automotive, medical and defense industries.
What are MEMS and How are they Fabricated?
MEMS basically integrate mechanical elements, sensors, actuators and electronics on a common silicon substrate through microfabrication technology. The fabrication process is broadly analogous to complementary metal-oxide-semiconductor (CMOS) logic chip manufacturing. It involves processes such as surface micromachining, bulk micromachining or LIGA (a German acronym) to etch out microscopic three-dimensional structures in silicon wafers. These MEMS structures can comprise springs, beams, gears, diaphragms and plates that can move or exert force. The micromachining process is followed by depositing structural and sacrificial layers of material and etching to release structures. Sensors and actuators can then be added along with metal interconnects and additional assemblies on the fabricated wafer.
Common MEMS Components and Applications
Some of the most commonly found Microelectromechanical systems components include accelerometers, gyroscopes, pressure sensors, microphones and optical MEMS. Advanced applications of MEMS have also touched every sector including:
- Automotive: Airbag deployment sensors, tire pressure sensors, oil quality sensors, stability control systems.
- Consumer Electronics: Electronic stability in devices, orientation sensors in smartphones and VR headsets, microphones and image stabilization in cameras.
- Industrial: Process control monitoring, motion control systems, vacuum applications.
- Medical: Lab-on-chip devices, miniaturized surgical tools, drug delivery systems, implantable medical devices.
- Aerospace: Inertial sensors for navigation, pressure sensors, micro turbines and accelerometers.
- Military: Night vision goggles, thermal imaging, targeting systems, laser warning systems.
Growth Potential and Future Trends
The global MEMS market was valued at $13.6 billion in 2017 and is projected to reach $33.8 billion by 2026, registering a CAGR of 11.2% during the forecast period. Immense miniaturization opportunities, increasing demand for sensor intensive IoT applications and adoption across new verticals are driving the industry growth. Some of the key future trends include further miniaturization towards nano-electromechanical systems (NEMS), 3D vertical integration, bioMEMS and development of new materials like graphene. Photonics-based MEMS are also emerging as more advanced optical systems are being pursued. Furthermore, MEMS technology will remain critical for futuristic application domains such as autonomous cars, personalized medicine, industrial automation and augmented reality devices.
Challenges and Overcoming Barriers
While MEMS offer immense possibilities, the technology still faces some challenges for wider adoption. The high initial investments and equipment costs involved in MEMS fabrication acts as a deterrent, especially for smaller companies. Mass manufacturing and yield issues also persist at miniaturized scales. Other concerns stem from reliability issues like wearing, material compatibility and stiction/contamination problems. Researchers are focused on low-cost MEMS manufacturing techniques like paper MEMS, flexible MEMS using polymers and enhanced release etch processes to improve yields. Standardization of testing protocols, packaging and platforms are also necessary to address reliability challenges and bring new MEMS products to the market. Overall, continued innovation and solving technological roadblocks will determine how the technology shapes our future.
In summary, MEMS have revolutionized the realm of miniaturized devices since their inception. With the immense opportunities presented by applications across every industry and growing markets, MEMS will spearhead our transition towards ubiquitous embedded sensing and intelligence everywhere. While fabricating at millimeter-scales poses inherent difficulties, continuous research on new materials and fabrication methods hold the promise to overcome existing challenges. If developed sustainably, MEMS technology could prove transformative in delivering an era of unseen conveniences fueled by invisible mini machines all around us.
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